Polarization-resolved metrology of optical coatings in the deep UV

 

 

 

Reliable DUV metrology remains challenging, particularly when accurate S/P separation and angle-dependent behavior must be measured simultaneously.

EssentOptics has developed a new measurement capability for PHOTON RT spectrophotometers, enabling polarization-resolved characterization of optical coatings starting from 185 nm. Unlike conventional approaches, the PHOTON RT platform delivers polarization-resolved measurements down to 185 nm without vacuum chambers or nitrogen purge.

Accurate S/P separation is critical for characterizing optical coatings in DUV lasers, lithography, and inspection optics, where polarization and angle-of-incidence must be tightly controlled. The PHOTON RT instrument ensures clear, reliable separation of S and P components across the Deep UV range.

Example of S- and P-polarized reflectance measurement of a DUV laser mirror at a 45° angle of incidence

 

 

High measurement repeatability is essential for reliable qualification of optical coatings in the Deep UV. The PHOTON RT instrument delivers stable, low-noise results with consistent repeatability.

Example of 11 consecutive scans measured with standard settings, no smoothing

 

Key features of the measurement capability:

• Deep UV range down to 185 nm
• Accurate S- and P-polarization separation
• Low spectral noise and high repeatability
• Measurements without vacuum chamber or nitrogen purge

The capability is available for PHOTON RT 0217 / 0226 spectrophotometers.

If you are working with Deep UV optical coatings, contact us to learn how this capability can improve your measurement accuracy and reliability.

Explore more optical measurement solutions:

• PHOTON RT family – flat optics, beamsplitters, prisms, and diffraction gratings
• LINZA family – spherical and aspherical optics, multi-element lens assemblies
• Applications – overview of measurement capabilities